Hot-Gun (Instant gas heating device)

Hot-gun function applied to vacuum line

  • Management of gas line condition • Increase the heat energy of flow gas for managing the gas line condition
  • Increase in yield rate : Improve the condition of process chamber for increasing the yield rate
  • Minimize particles : Minimize the particle issue with heat-up gas flow

Hot-gun function applied to exhaust line

  • Process Gas Dilution : Process gas dilution based on heat-up N2 flow
  • Suppress powder generation : Minimize Δt generation for suppressing powder generation
  • Reduction of PM interval : Suppress powder generation for reducing PM interval

Merits of hot-gun

  • Compact size can minimize the problem of space restriction during installation
  • Effective system operation with temperature management of flow gas
  • Customization depending on the installation position

PMS Specification

Classification Item Description
Common Item Power Single Phase 208 ~ 230 VAC. 50/60Hz
Temp. Control P.I.D Control (Sensor : K-Type)
N2 Pressure Source 5.0 kg/cm2 ↑
Material STS 316
Small Size Operation Temp. Max. 200℃
N2 Flow Rate Max. 100 SLM
Medium Size Operation Temp. Max. 300℃
N2 Flow Rate Max. 500 SLM
Large Size Operation Temp. Max. 200℃
N2 Flow Rate Max. 1,500 SLM